MICROSCOPE, OBSERVATION METHOD, AND CONTROL PROGRAM

[Problem] Provided is a microscope that illuminates a specimen from an oblique direction, and is capable of satisfactorily acquiring cross-sectional images of a thick specimen. [Solving means] A microscope (1) includes: an illumination optical system (4) that irradiates a specimen (S) with illuminat...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	MATSUI, Kumiko, NAKADA, Chieko, TOMOSUGI, Wataru
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS PICTORIAL COMMUNICATION, e.g. TELEVISION TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	[Problem] Provided is a microscope that illuminates a specimen from an oblique direction, and is capable of satisfactorily acquiring cross-sectional images of a thick specimen. [Solving means] A microscope (1) includes: an illumination optical system (4) that irradiates a specimen (S) with illumination light (L) from an oblique direction; an observation optical system (5, 30) including an objective lens (21); and a controller (9) that moves at least one of a stage (2) holding the specimen and the objective lens in the same direction as an optical axis (21a) of the objective lens. When the controller moves at least one of the stage and the objective lens, the controller changes an incident angle of the illumination light with respect to the specimen.