SCANNING TRANSMISSION ELECTRON MICROSCOPE AND METHOD FOR HIGH THROUGHPUT ACQUISITION OF ELECTRON SCATTERING ANGLE DISTRIBUTION IMAGES

SCANNING TRANSMISSION ELECTRON MICROSCOPE AND METHOD FOR HIGH THROUGHPUT ACQUISITION OF ELECTRON SCATTERING ANGLE DISTRIBUTION IMAGES

The invention provides a method and the electron beam device (1) for high throughput acquisition of electron scattering angle distribution images for structural determination of materials and which can be applied to nanoscale structures. The electron beam device (1) according the invention is optimi...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Petras, Stanislav, Benner, Gerd Ludwig, Lencová, Bohumila, Weiss, Jon Karl
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue
container_start_page
container_title
container_volume
creator Petras, Stanislav
Benner, Gerd Ludwig
Lencová, Bohumila
Weiss, Jon Karl
description The invention provides a method and the electron beam device (1) for high throughput acquisition of electron scattering angle distribution images for structural determination of materials and which can be applied to nanoscale structures. The electron beam device (1) according the invention is optimized for producing the electron scattering angle distribution image of object in low magnification and is characterized in that the electron beam system (1) further comprises a detector scan system (18) optimized for a fast off-axis shift of the electron scattering angle distribution image over the detector plane and beam blanker (23) which is blanking the beam (3,6) while the detector scan system (18) moves the transmitted electron beam (6) between subfields and during the readout of detector (12).
format Patent
fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_EP3379557A1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>EP3379557A1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_EP3379557A13</originalsourceid><addsrcrecordid>eNqNjTEKwkAQRdNYiHqHuYCFhBAs181kdyDZjTuzdQiyVqKBeAXvbSKCrdX_xfv_rbMXa-UcOQMSlOOWmMk7wAa1hLm0pINn7TsE5SpoUayvoPYBLBkLYoOPxnZRQOlzJCZZ5r7-PcwCEQyLQjnTIFTEEugUPyS1yiBvs9V1uE1p981NBjWKtvs0Pvo0jcMl3dOzxy7Py2NRlOqQ_4G8AZVjPe0</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>SCANNING TRANSMISSION ELECTRON MICROSCOPE AND METHOD FOR HIGH THROUGHPUT ACQUISITION OF ELECTRON SCATTERING ANGLE DISTRIBUTION IMAGES</title><source>esp@cenet</source><creator>Petras, Stanislav ; Benner, Gerd Ludwig ; Lencová, Bohumila ; Weiss, Jon Karl</creator><creatorcontrib>Petras, Stanislav ; Benner, Gerd Ludwig ; Lencová, Bohumila ; Weiss, Jon Karl</creatorcontrib><description>The invention provides a method and the electron beam device (1) for high throughput acquisition of electron scattering angle distribution images for structural determination of materials and which can be applied to nanoscale structures. The electron beam device (1) according the invention is optimized for producing the electron scattering angle distribution image of object in low magnification and is characterized in that the electron beam system (1) further comprises a detector scan system (18) optimized for a fast off-axis shift of the electron scattering angle distribution image over the detector plane and beam blanker (23) which is blanking the beam (3,6) while the detector scan system (18) moves the transmitted electron beam (6) between subfields and during the readout of detector (12).</description><language>eng ; fre ; ger</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ; ELECTRICITY ; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES ; MEASURING ; PHYSICS ; TESTING</subject><creationdate>2018</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20180926&amp;DB=EPODOC&amp;CC=EP&amp;NR=3379557A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25543,76293</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20180926&amp;DB=EPODOC&amp;CC=EP&amp;NR=3379557A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Petras, Stanislav</creatorcontrib><creatorcontrib>Benner, Gerd Ludwig</creatorcontrib><creatorcontrib>Lencová, Bohumila</creatorcontrib><creatorcontrib>Weiss, Jon Karl</creatorcontrib><title>SCANNING TRANSMISSION ELECTRON MICROSCOPE AND METHOD FOR HIGH THROUGHPUT ACQUISITION OF ELECTRON SCATTERING ANGLE DISTRIBUTION IMAGES</title><description>The invention provides a method and the electron beam device (1) for high throughput acquisition of electron scattering angle distribution images for structural determination of materials and which can be applied to nanoscale structures. The electron beam device (1) according the invention is optimized for producing the electron scattering angle distribution image of object in low magnification and is characterized in that the electron beam system (1) further comprises a detector scan system (18) optimized for a fast off-axis shift of the electron scattering angle distribution image over the detector plane and beam blanker (23) which is blanking the beam (3,6) while the detector scan system (18) moves the transmitted electron beam (6) between subfields and during the readout of detector (12).</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</subject><subject>ELECTRICITY</subject><subject>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</subject><subject>MEASURING</subject><subject>PHYSICS</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2018</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNjTEKwkAQRdNYiHqHuYCFhBAs181kdyDZjTuzdQiyVqKBeAXvbSKCrdX_xfv_rbMXa-UcOQMSlOOWmMk7wAa1hLm0pINn7TsE5SpoUayvoPYBLBkLYoOPxnZRQOlzJCZZ5r7-PcwCEQyLQjnTIFTEEugUPyS1yiBvs9V1uE1p981NBjWKtvs0Pvo0jcMl3dOzxy7Py2NRlOqQ_4G8AZVjPe0</recordid><startdate>20180926</startdate><enddate>20180926</enddate><creator>Petras, Stanislav</creator><creator>Benner, Gerd Ludwig</creator><creator>Lencová, Bohumila</creator><creator>Weiss, Jon Karl</creator><scope>EVB</scope></search><sort><creationdate>20180926</creationdate><title>SCANNING TRANSMISSION ELECTRON MICROSCOPE AND METHOD FOR HIGH THROUGHPUT ACQUISITION OF ELECTRON SCATTERING ANGLE DISTRIBUTION IMAGES</title><author>Petras, Stanislav ; Benner, Gerd Ludwig ; Lencová, Bohumila ; Weiss, Jon Karl</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_EP3379557A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre ; ger</language><creationdate>2018</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</topic><topic>ELECTRICITY</topic><topic>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</topic><topic>MEASURING</topic><topic>PHYSICS</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>Petras, Stanislav</creatorcontrib><creatorcontrib>Benner, Gerd Ludwig</creatorcontrib><creatorcontrib>Lencová, Bohumila</creatorcontrib><creatorcontrib>Weiss, Jon Karl</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Petras, Stanislav</au><au>Benner, Gerd Ludwig</au><au>Lencová, Bohumila</au><au>Weiss, Jon Karl</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>SCANNING TRANSMISSION ELECTRON MICROSCOPE AND METHOD FOR HIGH THROUGHPUT ACQUISITION OF ELECTRON SCATTERING ANGLE DISTRIBUTION IMAGES</title><date>2018-09-26</date><risdate>2018</risdate><abstract>The invention provides a method and the electron beam device (1) for high throughput acquisition of electron scattering angle distribution images for structural determination of materials and which can be applied to nanoscale structures. The electron beam device (1) according the invention is optimized for producing the electron scattering angle distribution image of object in low magnification and is characterized in that the electron beam system (1) further comprises a detector scan system (18) optimized for a fast off-axis shift of the electron scattering angle distribution image over the detector plane and beam blanker (23) which is blanking the beam (3,6) while the detector scan system (18) moves the transmitted electron beam (6) between subfields and during the readout of detector (12).</abstract><oa>free_for_read</oa></addata></record>
fulltext fulltext_linktorsrc
identifier
ispartof
issn
language eng ; fre ; ger
recordid cdi_epo_espacenet_EP3379557A1
source esp@cenet
subjects BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
title SCANNING TRANSMISSION ELECTRON MICROSCOPE AND METHOD FOR HIGH THROUGHPUT ACQUISITION OF ELECTRON SCATTERING ANGLE DISTRIBUTION IMAGES
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-24T02%3A21%3A29IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=Petras,%20Stanislav&rft.date=2018-09-26&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EEP3379557A1%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true