SCANNING TRANSMISSION ELECTRON MICROSCOPE AND METHOD FOR HIGH THROUGHPUT ACQUISITION OF ELECTRON SCATTERING ANGLE DISTRIBUTION IMAGES

The invention provides a method and the electron beam device (1) for high throughput acquisition of electron scattering angle distribution images for structural determination of materials and which can be applied to nanoscale structures. The electron beam device (1) according the invention is optimi...

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Bibliographische Detailangaben
Hauptverfasser:	Petras, Stanislav, Benner, Gerd Ludwig, Lencová, Bohumila, Weiss, Jon Karl
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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Beschreibung
Zusammenfassung:	The invention provides a method and the electron beam device (1) for high throughput acquisition of electron scattering angle distribution images for structural determination of materials and which can be applied to nanoscale structures. The electron beam device (1) according the invention is optimized for producing the electron scattering angle distribution image of object in low magnification and is characterized in that the electron beam system (1) further comprises a detector scan system (18) optimized for a fast off-axis shift of the electron scattering angle distribution image over the detector plane and beam blanker (23) which is blanking the beam (3,6) while the detector scan system (18) moves the transmitted electron beam (6) between subfields and during the readout of detector (12).