SCANNING ELECTRON MICROSCOPE

A scanning electron microscope (100) having a charged particle device that processes a specimen (S) using a charged particle beam, the scanning electron microscope (100) comprising: an electron source (12); a secondary-electron detector (30) that detects secondary electrons generated from the specimen; a backscattered-electron detector (40) that is disposed closer to the electron source (12) than a detection surface (32) of the secondary-electron detector (30) to detect backscattered electrons generated from the specimen (S); a shielding plate (50) for shielding a detection surface (32) of the backscattered-electron detector; and a moving mechanism (60) that moves the shielding plate (50). In a state where the shielding plate (50) is moved by the moving mechanism (60) so as to shield the detection surface (32) of the backscattered-electron detector (40), the shielding plate (50) is located between the detection surface (32) of the backscattered-electron detector and the detection surface (32) of the secondary-electron detector (30).