SCANNING ELECTRON MICROSCOPE

SCANNING ELECTRON MICROSCOPE

A scanning electron microscope (100) includes: a liner tube (8) which transmits an electron beam (EB); a scintillator (12) having a through-hole (12c) into which the liner tube (8) is inserted; a light guide (16) which guides light generated by the scintillator; a conductive layer (20) provided on a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: OHORI, Yuichiro, KURAMOTO, Tatsuru, MATSUDA, Yoshinori, AOSHIMA, Makoto
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Beschreibung
Zusammenfassung:A scanning electron microscope (100) includes: a liner tube (8) which transmits an electron beam (EB); a scintillator (12) having a through-hole (12c) into which the liner tube (8) is inserted; a light guide (16) which guides light generated by the scintillator; a conductive layer (20) provided on a sensitive surface of the scintillator; and a conductive member (22) provided in the scintillator, wherein the shortest distance (L1) between the liner tube (8) and the conductive member (22) is shorter than the shortest distance (L2) between the liner tube (8) and the conductive layer (20), a voltage for accelerating electrons is applied to the conductive layer (20), and the conductive layer (20) and the conductive member (22) have a same potential.