METHOD FOR ANALYZING AN OBJECT AND A CHARGED PARTICLE BEAM DEVICE FOR CARRYING OUT THIS METHOD

The invention relates to a method for analyzing an object using a charged particle beam device generating a beam of charged particles. Moreover, the invention relates to a charged particle beam device for carrying out this method. In particular, the charged particle beam device is an electron beam d...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	Bhattiprolu, Sreenivas, Lechner, Lorenz
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
Online-Zugang:	Volltext bestellen
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