METHOD FOR ANALYZING AN OBJECT AND A CHARGED PARTICLE BEAM DEVICE FOR CARRYING OUT THIS METHOD

The invention relates to a method for analyzing an object using a charged particle beam device generating a beam of charged particles. Moreover, the invention relates to a charged particle beam device for carrying out this method. In particular, the charged particle beam device is an electron beam device and/or an ion beam device. The charged particle beam device is used to generate high resolution 3D data sets by sequentially removing material from the object, exposing surfaces of the object and generating images of the surfaces. When removing material from the object, an opening is generated in the object. The opening comprises sides. Lamellas are generated comprising the sides. Material characteristics of those lamellas are identified. Moreover, filtered data is generated for each pixel of images of the sides of the opening. The method uses the information with respect to the identified material characteristics, the images of the sides and the filtered data of those images to obtain information on the material characteristics for each pixel of each surface generated when sequentially removing material from the object.