MICRO-SPECTROMETRY MEASUREMENT METHOD AND SYSTEM

The invention concerns an optical micro-spectrometry system comprising an optical microscope (10), a spectrometry system (50) and an optical system (14) adapted to direct an excitation light beam on the sample through said at least one microscope objective (11, 12) and to collect a Raman or PL light...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	Kokota, Alexandre, Marchessoux, Cédric, Shynkar, Vasyl
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	COLORIMETRY MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS RADIATION PYROMETRY TESTING
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Beschreibung
Zusammenfassung:	The invention concerns an optical micro-spectrometry system comprising an optical microscope (10), a spectrometry system (50) and an optical system (14) adapted to direct an excitation light beam on the sample through said at least one microscope objective (11, 12) and to collect a Raman or PL light beam from a sample. According to the invention, the optical micro-spectrometry system comprises an imaging system (16, 41) configured for acquiring a first image (71) and a second image (72) of the sample, by reflection or transmission of an illumination beam from a sample surface, the first image (71) having a large field of view and the second image (72) having a small field of view, a processing system (40) configured for determining an area in the first image (71) corresponding to the second image (72), a display system (44) configured for displaying the first image (71), the second image (72), and a third image (73) representing said area in overlay on the first image (71).