REDUCTION IN DEW FORMATION BY PREPARING SPECIMEN FOR INVESTIGATION

A lower-side structure (12) forms a specimen chamber (18) in which a specimen base is provided. An upper-side structure (14) forms a nozzle chamber (20) above the specimen chamber (18). The specimen chamber (18) and the nozzle chamber (20) are separated by a gate valve (16). In the nozzle chamber (2...

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Bibliographische Detailangaben
Hauptverfasser:	KUROKAWA, Akira, MORIOKA, Ayumi, HANDA, Nobuo, KUMAGAI, Kazuhiro, AKAI, Satoru
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	A lower-side structure (12) forms a specimen chamber (18) in which a specimen base is provided. An upper-side structure (14) forms a nozzle chamber (20) above the specimen chamber (18). The specimen chamber (18) and the nozzle chamber (20) are separated by a gate valve (16). In the nozzle chamber (20), at least a tip opening (36) of a nozzle (34) that ejects a specimen is present. A control device (74) maintains a relationship of gas pressures such that a gas pressure in the specimen chamber (18) is higher than a gas pressure in the nozzle chamber (20) when the lower-side structure (12) and the upper-side structure (14) are in communication with each other.