A MEMS FRAME HEATING PLATFORM FOR ELECTRON IMAGABLE FLUID RESERVOIRS OR LARGER CONDUCTIVE SAMPLES

An environmental cell for heating a sample in a microscope sample holder for electron microscopy is described. The environmental cell includes a window device (102) and a MEMS heating device (104) stacked to create a void between the window device (102) and the MEMS heating device (104) to provide s...

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Bibliographische Detailangaben
Hauptverfasser:	CARPENTER, William Bradford, NACKASHI, David P, GARDINER, Daniel Stephen, DAMIANO JR., John, WALDEN II, Franklin Stampley
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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Beschreibung
Zusammenfassung:	An environmental cell for heating a sample in a microscope sample holder for electron microscopy is described. The environmental cell includes a window device (102) and a MEMS heating device (104) stacked to create a void between the window device (102) and the MEMS heating device (104) to provide space for liquid to be confined within the environmental cell. The MEMS heating device (104) includes at least one observation region, a thermally conductive structural frame that supports and flanks the observation region, and at least one heat source element supported by the thermally conductive structural frame. The heat source element is positioned on the thermally conductive structural frame such that it does not directly contact the at least one observation region. The thermally conductive structural frame is heated by the heat source element.