PURGE DEVICE, PURGE STOCKER, AND PURGE METHOD

PURGE DEVICE, PURGE STOCKER, AND PURGE METHOD

[Problem] Provided is a purge device capable of appropriately purging a container in accordance with the type of the container. [Solution] A purge device (4A) includes: a type detector (41) that detects a type of a container (F) to be purged; and a purge controller (42) that determines purge conditi...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MURATA, Masanao, YAMAJI, Takashi
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:[Problem] Provided is a purge device capable of appropriately purging a container in accordance with the type of the container. [Solution] A purge device (4A) includes: a type detector (41) that detects a type of a container (F) to be purged; and a purge controller (42) that determines purge conditions for the container based on a detection result from the type detector.