METHOD FOR MANUFACTURING AN IMPROVED PIEZOELECTRIC MATERIAL

The invention relates to a method for manufacturing an improved piezo electric material comprising the steps of: - providing a pulsed laser deposition device with a target and a substrate, wherein the target material is a piezo electric material; - depositing a first layer of target material on the...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	Duc Nguyen, Minh, Rijnders, Augustinus Josephus Helena Maria, Dekkers, Jan Matthijn
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	The invention relates to a method for manufacturing an improved piezo electric material comprising the steps of: - providing a pulsed laser deposition device with a target and a substrate, wherein the target material is a piezo electric material; - depositing a first layer of target material on the substrate by operating the pulsed laser deposition device, wherein the deposition rate is set to a first value; - depositing a second layer of target material on top of the first layer by operating the pulsed laser deposition device, wherein the deposition rate is set to a second value, wherein the second value is at least one and a half of the first value.