VOLATILE MONOAMINO-DIALKOXYSILANES AND THEIR USE FOR CREATING SILICON-CONTAINING FILMS

Alkoxyaminosilane compounds having formula I, and processes and compositions for depositing a silicon-containing film, are described herein: (R 1 R 2 )NSiR 3 OR 4 OR 5 Formula (I) wherein R 1 is independently selected from a linear or branched C 1 to C 10 alkyl group; a C...

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Bibliographische Detailangaben
Hauptverfasser:	SPENCE, Daniel P, HO, Richard, LEI, Xinjian, O'NEILL, Mark Leonard, CHANDRA, Haripin, XIAO, Manchao, PEARLSTEIN, Ronald Martin
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAININGELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN,SULFUR, SELENIUM OR TELLURIUM ADHESIVES CHEMICAL PAINT OR INK REMOVERS CHEMISTRY COATING COMPOSITIONS, e.g. PAINTS, VARNISHES ORLACQUERS CORRECTING FLUIDS DYES FILLING PASTES INKS METALLURGY MISCELLANEOUS APPLICATIONS OF MATERIALS MISCELLANEOUS COMPOSITIONS NATURAL RESINS ORGANIC CHEMISTRY PAINTS PASTES OR SOLIDS FOR COLOURING OR PRINTING POLISHES USE OF MATERIALS THEREFOR WOODSTAINS
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Beschreibung
Zusammenfassung:	Alkoxyaminosilane compounds having formula I, and processes and compositions for depositing a silicon-containing film, are described herein: (R 1 R 2 )NSiR 3 OR 4 OR 5 Formula (I) wherein R 1 is independently selected from a linear or branched C 1 to C 10 alkyl group; a C 2 to C 12 alkenyl group; a C 2 to C 12 alkynyl group; a C 4 to C 10 cyclic alkyl group; and a C 6 to C 10 aryl group; R 2 and R 3 are each independently selected from hydrogen; a linear or branched C 1 to C 10 alkyl group; a C 3 to C 12 alkenyl group, a C 3 to C 12 alkynyl group, a C 4 to C 10 cyclic alkyl group, and a C 6 to C 10 aryl group; and R 4 and R 5 are each independently selected from a linear or branched C 1 to C 10 alkyl group; a C 2 to C 12 alkenyl group; a C 2 to C 12 alkynyl group; a C 4 to C 10 cyclic alkyl group; and a C 6 to C 10 aryl group.