INSPECTION SUPPORT APPARATUS AND CONTROL METHOD THEREOF, INSPECTION SYSTEM, AND CONTROL PROGRAM

A user easily ascertains a plurality of types of defects that may have occurred. A storage unit (30) stores a defect correlation table (53) indicating what influence a given type of defect will have on the inspection of the other types of defects. When an obtainment unit (42) obtains an inspection r...

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Bibliographische Detailangaben

Hauptverfasser:	NAKAI, Takuya, FUNAMOTO, Akihiro, TOMITA, Kohei, TAKEUCHI, Tsuyoshi, SANO, Akihiko
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ELECTRICITY GENERATION GENERATION OF ELECTRIC POWER BY CONVERSION OF INFRA-REDRADIATION, VISIBLE LIGHT OR ULTRAVIOLET LIGHT, E.G. USINGPHOTOVOLTAIC [PV] MODULES
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