INSPECTION SUPPORT APPARATUS AND CONTROL METHOD THEREOF, INSPECTION SYSTEM, AND CONTROL PROGRAM

A user easily ascertains a plurality of types of defects that may have occurred. A storage unit (30) stores a defect correlation table (53) indicating what influence a given type of defect will have on the inspection of the other types of defects. When an obtainment unit (42) obtains an inspection r...

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Bibliographische Detailangaben
Hauptverfasser: NAKAI, Takuya, FUNAMOTO, Akihiro, TOMITA, Kohei, TAKEUCHI, Tsuyoshi, SANO, Akihiko
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:A user easily ascertains a plurality of types of defects that may have occurred. A storage unit (30) stores a defect correlation table (53) indicating what influence a given type of defect will have on the inspection of the other types of defects. When an obtainment unit (42) obtains an inspection result of inspecting for a defect, an influence determination unit (43) refers to the defect correlation table (53) and determines the influence of the other types of defects on the inspection result. Information pertaining to the determined influence is outputted via an output unit (31).