ELECTRODE ARRANGEMENT AND PLASMA-TREATMENT APPARATUS FOR SURFACE-TREATING A BODY

An electrode arrangement (18) for surface-treating a body (11) with a physical plasma has a high-voltage connection (19) for connection to an output (6) of an alternating high-voltage source which generates an alternating high voltage, a plurality of linear electrode bodies (2) and a treatment area...

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Bibliographische Detailangaben
Hauptverfasser: VIÖL, Wolfgang, KÖHLER, Robert, WIENEKE, Stephan, TEN BOSCH, Lars
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:An electrode arrangement (18) for surface-treating a body (11) with a physical plasma has a high-voltage connection (19) for connection to an output (6) of an alternating high-voltage source which generates an alternating high voltage, a plurality of linear electrode bodies (2) and a treatment area (9) which adjoins the electrode bodies (2). The electrode bodies (2) are connected jointly to the high-voltage connection (19) in such a way that the same alternating high voltage is applied to all of the electrode bodies (2). The electrode bodies (2) each comprise an arcuate region (10) in which the respective linear electrode body (2) changes its direction by at least 90°; and the electrode bodies (2) are sheathed by a dielectric (4) and/or are individually coupled to the high-voltage connection (19) in a capacitive manner. The treatment area (9) into which the body (11) for surface-treatment with the physical plasma is to be introduced is located at least partially between the arcuate regions (10) of the electrode bodies (2).