IMPROVED MEMS SWITCH

Several features are disclosed that improve the operating performance of MEMS switches such that they exhibit improved in-service life and better control over switching on and off.

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Bibliographische Detailangaben
Hauptverfasser:	LAMBKIN, Paul, WONG, Jo-ey, GOGGIN, Raynond C, STENSON, Bernard Patrick, SCHIRMER, Mark, FITZGERALD, Padraig L
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SWITCHES ELECTRICITY EMERGENCY PROTECTIVE DEVICES RELAYS SELECTORS
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Beschreibung
Zusammenfassung:	Several features are disclosed that improve the operating performance of MEMS switches such that they exhibit improved in-service life and better control over switching on and off.