A DEVICE AND METHOD OF MANUFACTURING HIGH ASPECT RATIO STRUCTURES

A method of manufacturing a Lithium battery (100) with a current collector formed of pillars (11) on a substrate face (10), wherein the method comprises: forming elongate and aligned structures forming electrically conductive pillars (11) on the substrate face (10) with upstanding pillar walls extending from a pillar base to a pillar top; wherein the pillars are covered with a laminate comprising a first electrode (12), a solid state electrolyte layer (13); a second electrode layer (14), and a topstrate (20) forming an electrode part; and wherein at least one of the first electrode layer, second electrode layer and topstrate layer is non-conformally coated to prevent Lithium intercalation into the first or second electrode near the pillar base by limiting cracking at the pillar base when volume expansion/contraction of the electrode layers happens during the battery charge/discharge cycles.