METHOD FOR DETERMINING AND COMPENSATING FOR GEOMETRIC ABERRATIONS

A method for the determination and compensation of geometric imaging errors which occur during the imaging of an object by sequential single or multispot scanning by means of a microscopic imaging system, which includes: establishing a reference object with a defined plane structure; and generating...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	HAASE, Daniel, KLEMM, Frank, ROSCHER, Burkhard, KAUOLD, Tobias, ANHUT, Tiemo, SCHWEDT, Daniel
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	A method for the determination and compensation of geometric imaging errors which occur during the imaging of an object by sequential single or multispot scanning by means of a microscopic imaging system, which includes: establishing a reference object with a defined plane structure; and generating an electronic image data set of this structure free of geometric imaging errors. Then, generating at least one electronic actual image data set with the imaging system; comparing the actual image data set with the reference image data set with respect to the locations of those pixels which have the same object point as origin in each case; and determining location deviations in the actual image data set compared to the reference image data set.