MONITORING APPARATUS, LITHOGRAPHIC APPARATUS AND METHOD OF MONITORING A CHANGE IN A PROPERTY

Disclosed is a monitoring apparatus configured to monitor a change in a property. The monitoring apparatus comprises a fiber-Bragg grating sensor, an amplifier, an integrator and a processor. The fiber-Bragg grating sensor is operable to sense a band of wavelengths of incident radiation and to outpu...

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Bibliographische Detailangaben
Hauptverfasser:	LEIJTENS, Johannes, Adrianus, Petrus, HAVERDINGS, Michael, Benjamin, AKKERMANS, Johannes, Antonius, Gerardus, LEENKNEGT, George, Alois, Leonie, KAT, Pieter, Lucas
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR MEASURING MEASURING ANGLES MEASURING AREAS MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS TESTING
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Beschreibung
Zusammenfassung:	Disclosed is a monitoring apparatus configured to monitor a change in a property. The monitoring apparatus comprises a fiber-Bragg grating sensor, an amplifier, an integrator and a processor. The fiber-Bragg grating sensor is operable to sense a band of wavelengths of incident radiation and to output a corresponding sensor output signal. The band of radiation is centered upon a first value representing a Bragg wavelength. The amplifier is arranged to separate the sensor output signal in a first part and a second part, to create an inverted first part by inverting the first part, and to create an amplified signal based on the inverted first part and the second part. The integrator is operable to integrate the amplified signal to obtain an integrated signal. The processor operable to derive a second value representative of a shift of the Bragg wavelength based on the integrated signal.