SYSTEMS AND METHODS FOR AN INTERCHANGEABLE ILLUMINATION FILTER SET FOR USE IN A STRUCTURED ILLUMINATION IMAGING SYSTEM
An apparatus for generating structured illumination images, comprising a housing; imaging optics mounted within the housing, the imaging optics configured to focus illumination from an illumination source such that an in-focus pattern of light corresponding to a pattern on a photomask is projected o...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | An apparatus for generating structured illumination images, comprising a housing; imaging optics mounted within the housing, the imaging optics configured to focus illumination from an illumination source such that an in-focus pattern of light corresponding to a pattern on a photomask is projected onto a sample; a reflector mounted within the housing and configured to reflect the illumination to a sample; a filter apparatus, comprising one or more filters mounted within the housing, the filter apparatus configured to allow only emissions from the illuminated sample to pass through to the sensor; and mounting features on the housing, the mounting features configured to allow the apparatus to be installed within an imaging system. |
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