METHOD, MEASUREMENT PROBE AND MEASUREMENT SYSTEM FOR DETERMINING PLASMA CHARACTERISTICS

The invention relates to a method and a device for determining plasma characteristics, the method comprising the steps of: - arranging a measurement probe (2) having a self-inductance in proximity to a plasma (3) to establish inductive coupling between the plasma (3) and the measurement probe (2); -...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HOWLING, Alan, FURNO, Ivo, GUITTIENNE, Philippe
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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