STATIC PRESSURE GAS BEARING

A static pressure gas bearing used in a vacuum environment includes a guide shaft and a tubular slider 20 which is movable in an axial direction in a state where the guide shaft is accommodated therein. The slider 20 is configured by fastening a plurality of plate-shaped members 20A to 20D. A film 2...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	SAKAKI, Kazutoshi, YOSHIDA, Tatsuya
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BEARINGS BLASTING ELEMENTS OR CRANKSHAFT MECHANISMS ENGINEERING ELEMENTS AND UNITS FLEXIBLE SHAFTS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING LIGHTING MECHANICAL ENGINEERING ROTARY BODIES OTHER THAN GEARING ELEMENTS SHAFTS THERMAL INSULATION IN GENERAL WEAPONS
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Beschreibung
Zusammenfassung:	A static pressure gas bearing used in a vacuum environment includes a guide shaft and a tubular slider 20 which is movable in an axial direction in a state where the guide shaft is accommodated therein. The slider 20 is configured by fastening a plurality of plate-shaped members 20A to 20D. A film 24 formed of a soft material having a smaller elastic modulus than that of each of the plate-shaped members is interposed between joint surfaces of the plate-shaped members.