MOISTURE SENSOR WITH THERMAL MODULE

A humidity sensor is provided, including a silicon base plate on which several intermetallic dielectric layers, each of which is provided with a metallic zone, and a metal layer are disposed, wherein the metal layer is etched to form two electrodes, each including an armature provided with a plurali...

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1. Verfasser:	NOVAC, Pinchas
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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creator	NOVAC, Pinchas
description	A humidity sensor is provided, including a silicon base plate on which several intermetallic dielectric layers, each of which is provided with a metallic zone, and a metal layer are disposed, wherein the metal layer is etched to form two electrodes, each including an armature provided with a plurality of arms, wherein each armature is mounted so that the arms are interlaced to have arms positioned to face one another. The sensor also includes a temperature module or a heating module.
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fullrecord	<record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_EP3262403B1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>EP3262403B1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_EP3262403B13</originalsourceid><addsrcrecordid>eNrjZFD29fcMDgkNclUIdvUL9g9SCPcM8VAI8XAN8nX0UfD1dwn1ceVhYE1LzClO5YXS3AwKbq4hzh66qQX58anFBYnJqXmpJfGuAcZGZkYmBsZOhsZEKAEAMCYifQ</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>MOISTURE SENSOR WITH THERMAL MODULE</title><source>esp@cenet</source><creator>NOVAC, Pinchas</creator><creatorcontrib>NOVAC, Pinchas</creatorcontrib><description>A humidity sensor is provided, including a silicon base plate on which several intermetallic dielectric layers, each of which is provided with a metallic zone, and a metal layer are disposed, wherein the metal layer is etched to form two electrodes, each including an armature provided with a plurality of arms, wherein each armature is mounted so that the arms are interlaced to have arms positioned to face one another. The sensor also includes a temperature module or a heating module.</description><language>eng ; fre ; ger</language><subject>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES ; MEASURING ; PHYSICS ; TESTING</subject><creationdate>2019</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20190403&DB=EPODOC&CC=EP&NR=3262403B1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76289</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20190403&DB=EPODOC&CC=EP&NR=3262403B1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>NOVAC, Pinchas</creatorcontrib><title>MOISTURE SENSOR WITH THERMAL MODULE</title><description>A humidity sensor is provided, including a silicon base plate on which several intermetallic dielectric layers, each of which is provided with a metallic zone, and a metal layer are disposed, wherein the metal layer is etched to form two electrodes, each including an armature provided with a plurality of arms, wherein each armature is mounted so that the arms are interlaced to have arms positioned to face one another. The sensor also includes a temperature module or a heating module.</description><subject>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</subject><subject>MEASURING</subject><subject>PHYSICS</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2019</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZFD29fcMDgkNclUIdvUL9g9SCPcM8VAI8XAN8nX0UfD1dwn1ceVhYE1LzClO5YXS3AwKbq4hzh66qQX58anFBYnJqXmpJfGuAcZGZkYmBsZOhsZEKAEAMCYifQ</recordid><startdate>20190403</startdate><enddate>20190403</enddate><creator>NOVAC, Pinchas</creator><scope>EVB</scope></search><sort><creationdate>20190403</creationdate><title>MOISTURE SENSOR WITH THERMAL MODULE</title><author>NOVAC, Pinchas</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_EP3262403B13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre ; ger</language><creationdate>2019</creationdate><topic>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</topic><topic>MEASURING</topic><topic>PHYSICS</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>NOVAC, Pinchas</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>NOVAC, Pinchas</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>MOISTURE SENSOR WITH THERMAL MODULE</title><date>2019-04-03</date><risdate>2019</risdate><abstract>A humidity sensor is provided, including a silicon base plate on which several intermetallic dielectric layers, each of which is provided with a metallic zone, and a metal layer are disposed, wherein the metal layer is etched to form two electrodes, each including an armature provided with a plurality of arms, wherein each armature is mounted so that the arms are interlaced to have arms positioned to face one another. The sensor also includes a temperature module or a heating module.</abstract><oa>free_for_read</oa></addata></record>
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language	eng ; fre ; ger
recordid	cdi_epo_espacenet_EP3262403B1
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subjects	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
title	MOISTURE SENSOR WITH THERMAL MODULE
url	https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-11T10%3A48%3A06IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=NOVAC,%20Pinchas&rft.date=2019-04-03&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EEP3262403B1%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true