MOISTURE SENSOR WITH THERMAL MODULE

MOISTURE SENSOR WITH THERMAL MODULE

A humidity sensor is provided, including a silicon base plate on which several intermetallic dielectric layers, each of which is provided with a metallic zone, and a metal layer are disposed, wherein the metal layer is etched to form two electrodes, each including an armature provided with a plurali...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: NOVAC, Pinchas
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:A humidity sensor is provided, including a silicon base plate on which several intermetallic dielectric layers, each of which is provided with a metallic zone, and a metal layer are disposed, wherein the metal layer is etched to form two electrodes, each including an armature provided with a plurality of arms, wherein each armature is mounted so that the arms are interlaced to have arms positioned to face one another. The sensor also includes a temperature module or a heating module.