DEPOSITION PROCESS

A process for depositing an inorganic material on a substrate, the process comprising, providing a substrate having a surface, providing a precursor mixture comprising a metal sulfonate, and delivering the precursor mixture to the surface of the substrate, wherein the surface of the substrate is at...

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Bibliographische Detailangaben
Hauptverfasser: CARMALT, Claire J, PARKIN, Ivan P, HURST, Simon James, RAISBECK, Deborah, MANZI, Joe, A
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:A process for depositing an inorganic material on a substrate, the process comprising, providing a substrate having a surface, providing a precursor mixture comprising a metal sulfonate, and delivering the precursor mixture to the surface of the substrate, wherein the surface of the substrate is at a substrate temperature of above 450° C. and is sufficient to effect decomposition of the metal sulfonate. The inorganic material may include a metal or a metal oxide. The preferred metal sulfonate is metal triflate.