MECHANICAL OSCILLATOR AND ASSOCIATED PRODUCTION METHOD

A mechanical oscillator endowed with a strip, with the aforesaid strip incorporating a first silicon layer having a crystal lattice extending along a first direction of one plane, a thermal compensation layer composed of a material having a Young's modulus thermal coefficient of opposite sign t...

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Bibliographische Detailangaben
Hauptverfasser: GAFF, Vincent, RIBETTO, Luca, VISSE, Pierre-Marie
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:A mechanical oscillator endowed with a strip, with the aforesaid strip incorporating a first silicon layer having a crystal lattice extending along a first direction of one plane, a thermal compensation layer composed of a material having a Young's modulus thermal coefficient of opposite sign to that of the silicon, and a second silicon layer having a crystal lattice extending in a second direction of the plane, with the first and direction being offset at an angle of 45° within the plane of the layers, and with the thermal compensation layer extending between the first and second silicon layers.