3D PRINTED CHAMBER COMPONENTS CONFIGURED FOR LOWER FILM STRESS AND LOWER OPERATING TEMPERATURE

A chamber component for a processing chamber is disclosed herein. In one embodiment, a chamber component for a processing chamber includes a component part body having unitary monolithic construction. The component part body has a textured surface. The textured surface includes a plurality of indepe...

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Bibliographische Detailangaben
Hauptverfasser:	VASANTHA, Bopanna Ichettira, KELKAR, Umesh M, RAJ, Govinda, YOSHIDOME, Goichi, NARENDRNATH, Kadthala R
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	ADDITIVE MANUFACTURING TECHNOLOGY ADDITIVE MANUFACTURING, i.e. MANUFACTURING OFTHREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVEAGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING,STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING BASIC ELECTRIC ELEMENTS CASTING DEVICES USING STIMULATED EMISSION ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY MAKING METALLIC POWDER MANUFACTURE OF ARTICLES FROM METALLIC POWDER PERFORMING OPERATIONS POWDER METALLURGY TRANSPORTING WORKING METALLIC POWDER
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Beschreibung
Zusammenfassung:	A chamber component for a processing chamber is disclosed herein. In one embodiment, a chamber component for a processing chamber includes a component part body having unitary monolithic construction. The component part body has a textured surface. The textured surface includes a plurality of independent engineered macro features integrally formed with the component part body. The engineered macro features include a macro feature body extending from the textured surface.