METHOD AND APPARTUS FOR DETACHING A MICRO-CHIP FROM A WAFER AND PLACEMENT OF THE MICRO-CHIP ON A SUBSTRATE
Method and device for severing a microchip from a wafer and arranging the microchip on a substrate, wherein the microchip is contact-bonded to the free end of a tip during severing and accordingly adheres to the tip through adhesive force while the substrate is transported. A coordinate measuring ma...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | Method and device for severing a microchip from a wafer and arranging the microchip on a substrate, wherein the microchip is contact-bonded to the free end of a tip during severing and accordingly adheres to the tip through adhesive force while the substrate is transported. A coordinate measuring machine can advantageously be used as device. |
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