METHOD OF DETECTING AN ARC OCCURRING DURING THE POWER SUPPLY OF A PLASMA PROCESS, CONTROL UNIT FOR A PLASMA POWER SUPPLY, AND PLASMA POWER SUPPLY
A plasma power supply (10) for supplying a plasma process in a plasma chamber(30) with a power comprises: a. a DC-Source (15); b. an output signal generator (16) connected to the DC source (15); c. a first signal sequence measurement device (20) for measuring a signal sequence present between the DC...
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| creator | GIERALTOWSKI, Andrzej GAPIÑSKI, Cezary ZELECHOWSKI, Marcin LACH, Piotr GRABOWSKI, Adam |
| description | A plasma power supply (10) for supplying a plasma process in a plasma chamber(30) with a power comprises:
a. a DC-Source (15);
b. an output signal generator (16) connected to the DC source (15);
c. a first signal sequence measurement device (20) for measuring a signal sequence present between the DC source (15) and the output signal generator (16);
d. a second signal sequence measurement device (18, 19) for measuring a signal sequence present at the output of the output signal generator (16);
f. a control unit (14), which is connected to the first and second signal sequence measurement devices (18, 19, 20). |
| format | Patent |
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a. a DC-Source (15);
b. an output signal generator (16) connected to the DC source (15);
c. a first signal sequence measurement device (20) for measuring a signal sequence present between the DC source (15) and the output signal generator (16);
d. a second signal sequence measurement device (18, 19) for measuring a signal sequence present at the output of the output signal generator (16);
f. a control unit (14), which is connected to the first and second signal sequence measurement devices (18, 19, 20).</description><language>eng ; fre ; ger</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ; ELECTRICITY</subject><creationdate>2019</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20190206&DB=EPODOC&CC=EP&NR=3234980B1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76289</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20190206&DB=EPODOC&CC=EP&NR=3234980B1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>GIERALTOWSKI, Andrzej</creatorcontrib><creatorcontrib>GAPIÑSKI, Cezary</creatorcontrib><creatorcontrib>ZELECHOWSKI, Marcin</creatorcontrib><creatorcontrib>LACH, Piotr</creatorcontrib><creatorcontrib>GRABOWSKI, Adam</creatorcontrib><title>METHOD OF DETECTING AN ARC OCCURRING DURING THE POWER SUPPLY OF A PLASMA PROCESS, CONTROL UNIT FOR A PLASMA POWER SUPPLY, AND PLASMA POWER SUPPLY</title><description>A plasma power supply (10) for supplying a plasma process in a plasma chamber(30) with a power comprises:
a. a DC-Source (15);
b. an output signal generator (16) connected to the DC source (15);
c. a first signal sequence measurement device (20) for measuring a signal sequence present between the DC source (15) and the output signal generator (16);
d. a second signal sequence measurement device (18, 19) for measuring a signal sequence present at the output of the output signal generator (16);
f. a control unit (14), which is connected to the first and second signal sequence measurement devices (18, 19, 20).</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</subject><subject>ELECTRICITY</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2019</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZJjo6xri4e-i4O-m4OIa4uoc4unnruDop-AY5Kzg7-wcGhQEEnAJBVMhHq4KAf7hrkEKwaEBAT6RIF2OCgE-jsG-QCrI39k1OFhHwdnfLyTI30ch1M8zRMHNPwhJCZJeHaAtLtgkeBhY0xJzilN5oTQ3g4Kba4izh25qQX58anFBYnJqXmpJvGuAsZGxiaWFgZOhMRFKAMO2QBU</recordid><startdate>20190206</startdate><enddate>20190206</enddate><creator>GIERALTOWSKI, Andrzej</creator><creator>GAPIÑSKI, Cezary</creator><creator>ZELECHOWSKI, Marcin</creator><creator>LACH, Piotr</creator><creator>GRABOWSKI, Adam</creator><scope>EVB</scope></search><sort><creationdate>20190206</creationdate><title>METHOD OF DETECTING AN ARC OCCURRING DURING THE POWER SUPPLY OF A PLASMA PROCESS, CONTROL UNIT FOR A PLASMA POWER SUPPLY, AND PLASMA POWER SUPPLY</title><author>GIERALTOWSKI, Andrzej ; GAPIÑSKI, Cezary ; ZELECHOWSKI, Marcin ; LACH, Piotr ; GRABOWSKI, Adam</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_EP3234980B13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre ; ger</language><creationdate>2019</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</topic><topic>ELECTRICITY</topic><toplevel>online_resources</toplevel><creatorcontrib>GIERALTOWSKI, Andrzej</creatorcontrib><creatorcontrib>GAPIÑSKI, Cezary</creatorcontrib><creatorcontrib>ZELECHOWSKI, Marcin</creatorcontrib><creatorcontrib>LACH, Piotr</creatorcontrib><creatorcontrib>GRABOWSKI, Adam</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>GIERALTOWSKI, Andrzej</au><au>GAPIÑSKI, Cezary</au><au>ZELECHOWSKI, Marcin</au><au>LACH, Piotr</au><au>GRABOWSKI, Adam</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>METHOD OF DETECTING AN ARC OCCURRING DURING THE POWER SUPPLY OF A PLASMA PROCESS, CONTROL UNIT FOR A PLASMA POWER SUPPLY, AND PLASMA POWER SUPPLY</title><date>2019-02-06</date><risdate>2019</risdate><abstract>A plasma power supply (10) for supplying a plasma process in a plasma chamber(30) with a power comprises:
a. a DC-Source (15);
b. an output signal generator (16) connected to the DC source (15);
c. a first signal sequence measurement device (20) for measuring a signal sequence present between the DC source (15) and the output signal generator (16);
d. a second signal sequence measurement device (18, 19) for measuring a signal sequence present at the output of the output signal generator (16);
f. a control unit (14), which is connected to the first and second signal sequence measurement devices (18, 19, 20).</abstract><oa>free_for_read</oa></addata></record> |
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| language | eng ; fre ; ger |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY |
| title | METHOD OF DETECTING AN ARC OCCURRING DURING THE POWER SUPPLY OF A PLASMA PROCESS, CONTROL UNIT FOR A PLASMA POWER SUPPLY, AND PLASMA POWER SUPPLY |
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