NANOLAMINATE GAS SENSOR AND METHOD OF FABRICATING A NANOLAMINATE GAS SENSOR USING ATOMIC LAYER DEPOSITION

NANOLAMINATE GAS SENSOR AND METHOD OF FABRICATING A NANOLAMINATE GAS SENSOR USING ATOMIC LAYER DEPOSITION

A thin film gas sensor device includes a substrate, a first electrode supported by the substrate, a second electrode supported by the substrate, and a gas-sensitive structure. The gas-sensitive structure is supported by the substrate and is electrically connected to the first and second electrodes....

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: O'BRIEN, Gary, SAMARAO, Ashwin, K
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:A thin film gas sensor device includes a substrate, a first electrode supported by the substrate, a second electrode supported by the substrate, and a gas-sensitive structure. The gas-sensitive structure is supported by the substrate and is electrically connected to the first and second electrodes. The gas sensitive structure includes a plurality of thin film layers of a first material vertically interleaved with a plurality of thin film layers of a second material. The first and second materials are mutually catalytic materials.