FILTER DEVICE TO REMOVE PARTICLES FROM A VAPOUR STREAM

A filter device for reducing the amount of non-vaporous components in a vapour stream, including a carbon foam as filter material capable of being penetrated by the vapour stream and arranged in such a way that the only route for the vapour stream to pass the carbon foam is via penetration of the ca...

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Hauptverfasser: ZOESTBERGEN, Edzo, COMMANDEUR, Colin, BURTON, Daniel Brian, MAALMAN, Theodorus Franciscus Jozef, BEENTJES, Petrus Cornelis Jozef
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Sprache:eng ; fre ; ger
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creator ZOESTBERGEN, Edzo
COMMANDEUR, Colin
BURTON, Daniel Brian
MAALMAN, Theodorus Franciscus Jozef
BEENTJES, Petrus Cornelis Jozef
description A filter device for reducing the amount of non-vaporous components in a vapour stream, including a carbon foam as filter material capable of being penetrated by the vapour stream and arranged in such a way that the only route for the vapour stream to pass the carbon foam is via penetration of the carbon foam. The device is in particular suitable for coating a substrate by physical vapour deposition of the vapour. The homogenous and single phase vapour stream produced by the filter device results in a smooth coated substrate wherein splashes are virtually absent.
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The device is in particular suitable for coating a substrate by physical vapour deposition of the vapour. 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language eng ; fre ; ger
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subjects CHEMICAL SURFACE TREATMENT
CHEMISTRY
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING MATERIAL WITH METALLIC MATERIAL
COATING METALLIC MATERIAL
DIFFUSION TREATMENT OF METALLIC MATERIAL
INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL
METALLURGY
SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
title FILTER DEVICE TO REMOVE PARTICLES FROM A VAPOUR STREAM
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