METHOD FOR PRODUCING CHLORINATED OLIGOSILANES

The present invention relates to a process for preparing chlorinated oligosilanes, wherein chlorinated polysilane having an empirical formula of SiCl1.0-2.8 and/or a mixture comprising the chlorinated polysilane is reacted with elemental chlorine or a chlorine-containing mixture. Additionally claime...

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Bibliographische Detailangaben
Hauptverfasser: MOHSSENI, Javad, AUNER, Norbert, HOLL, Sven, BAUCH, Christian
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:The present invention relates to a process for preparing chlorinated oligosilanes, wherein chlorinated polysilane having an empirical formula of SiCl1.0-2.8 and/or a mixture comprising the chlorinated polysilane is reacted with elemental chlorine or a chlorine-containing mixture. Additionally claimed are chlorinated oligosilanes prepared by the process and the use thereof for production of semiconductors and/or hard coatings.