METHOD AND APPARATUS FOR DECREASING THE RADIAL TEMPERATURE GRADIENT IN CVI/CVD FURNACES
A method and apparatus for decreasing the radial temperature gradient in CVI/CVD furnaces is provided. The apparatus may comprise a graphite susceptor (120) disposed within a vessel (115). Porous structures (142) may be stacked within the graphite susceptor. The stack (140) of porous structures may...
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creator | RUDOLPH, James W |
description | A method and apparatus for decreasing the radial temperature gradient in CVI/CVD furnaces is provided. The apparatus may comprise a graphite susceptor (120) disposed within a vessel (115). Porous structures (142) may be stacked within the graphite susceptor. The stack (140) of porous structures may form a circular shape proximate a radially inward surface of the graphite susceptor. Graphite panels may be disposed within the graphite susceptor. The graphite panels may be located proximate a radially inward surface of the porous structures. The graphite panels may radiate heat radially outward and towards the graphite susceptor. Reactant gas may be flowed into the graphite susceptor. |
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The apparatus may comprise a graphite susceptor (120) disposed within a vessel (115). Porous structures (142) may be stacked within the graphite susceptor. The stack (140) of porous structures may form a circular shape proximate a radially inward surface of the graphite susceptor. Graphite panels may be disposed within the graphite susceptor. The graphite panels may be located proximate a radially inward surface of the porous structures. The graphite panels may radiate heat radially outward and towards the graphite susceptor. 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The apparatus may comprise a graphite susceptor (120) disposed within a vessel (115). Porous structures (142) may be stacked within the graphite susceptor. The stack (140) of porous structures may form a circular shape proximate a radially inward surface of the graphite susceptor. Graphite panels may be disposed within the graphite susceptor. The graphite panels may be located proximate a radially inward surface of the porous structures. The graphite panels may radiate heat radially outward and towards the graphite susceptor. 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The apparatus may comprise a graphite susceptor (120) disposed within a vessel (115). Porous structures (142) may be stacked within the graphite susceptor. The stack (140) of porous structures may form a circular shape proximate a radially inward surface of the graphite susceptor. Graphite panels may be disposed within the graphite susceptor. The graphite panels may be located proximate a radially inward surface of the porous structures. The graphite panels may radiate heat radially outward and towards the graphite susceptor. Reactant gas may be flowed into the graphite susceptor.</abstract><oa>free_for_read</oa></addata></record> |
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subjects | ARTIFICIAL STONE CEMENTS CERAMICS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS CONCRETE DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL LIME, MAGNESIA METALLURGY REFRACTORIES SLAG SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TREATMENT OF NATURAL STONE |
title | METHOD AND APPARATUS FOR DECREASING THE RADIAL TEMPERATURE GRADIENT IN CVI/CVD FURNACES |
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