METHOD AND APPARATUS FOR DECREASING THE RADIAL TEMPERATURE GRADIENT IN CVI/CVD FURNACES

A method and apparatus for decreasing the radial temperature gradient in CVI/CVD furnaces is provided. The apparatus may comprise a graphite susceptor (120) disposed within a vessel (115). Porous structures (142) may be stacked within the graphite susceptor. The stack (140) of porous structures may...

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1. Verfasser: RUDOLPH, James W
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:A method and apparatus for decreasing the radial temperature gradient in CVI/CVD furnaces is provided. The apparatus may comprise a graphite susceptor (120) disposed within a vessel (115). Porous structures (142) may be stacked within the graphite susceptor. The stack (140) of porous structures may form a circular shape proximate a radially inward surface of the graphite susceptor. Graphite panels may be disposed within the graphite susceptor. The graphite panels may be located proximate a radially inward surface of the porous structures. The graphite panels may radiate heat radially outward and towards the graphite susceptor. Reactant gas may be flowed into the graphite susceptor.