OPTICAL PROCESSING NOZZLE AND OPTICAL PROCESSING DEVICE
An optical processing nozzle that homogeneously supplies a fluid to a processing surface in optical processing is provided. The optical processing nozzle includes a beam path that is arranged so that a beam can pass through the beam path toward a processing surface in order to perform processing usi...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | An optical processing nozzle that homogeneously supplies a fluid to a processing surface in optical processing is provided. The optical processing nozzle includes a beam path that is arranged so that a beam can pass through the beam path toward a processing surface in order to perform processing using a beam guided from a light source, and a channel structure that is arranged around the beam path and is configured to eject a fluid toward the processing surface. The channel structure includes an inflow port through which the fluid flows, at least two passage holes through which the fluid flowing from the inflow port passes, a channel that guides the fluid from the inflow port to the passage holes, and an ejection port from which the fluid having passed through the at least two passage holes is ejected toward the processing surface. The at least two passage holes are arranged to be spatially symmetrical with respect to the inflow port, and the ejection port is arranged to be spatially symmetrical with respect to the optical axis of a beam coming out from the beam path. |
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