ELECTROSTATIC BIPRISM

The invention relates to an electrostatic biprism comprising a multilayer with a freestanding electrode, being preferably a multi-biprism, the method for preparing said electrostatic biprism and the use of said biprism within an electron beam device. The invention further relates to a microscope, an...

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Bibliographische Detailangaben
Hauptverfasser:	COOPER, David, GIRARD, Olivier, DUCHAMP, Martial, DUNIN-BORKOWSKI, Rafal Edward
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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Beschreibung
Zusammenfassung:	The invention relates to an electrostatic biprism comprising a multilayer with a freestanding electrode, being preferably a multi-biprism, the method for preparing said electrostatic biprism and the use of said biprism within an electron beam device. The invention further relates to a microscope, an interferometer or an electron beam device comprising said electrostatic biprism.