METHOD FOR CONTROLLING POSITION OF A LINEAR MEMS MIRROR WITH VARIABLE RESOLUTION AND/OR LIGHT INTENSITY

The method for controlling an angular position of a MEMS mirror includes: applying a first driving moment to the MEMS mirror to generate a rotational scanning movement of the mirror; and, at a zooming instant, applying a second driving moment to the MEMS mirror, wherein the second driving moment is...

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Bibliographische Detailangaben
Hauptverfasser:	DUVDEVANY, Offir, SHARON, Dadi, SOURANI, Sason
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PERFORMING OPERATIONS PHYSICS TRANSPORTING
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Beschreibung
Zusammenfassung:	The method for controlling an angular position of a MEMS mirror includes: applying a first driving moment to the MEMS mirror to generate a rotational scanning movement of the mirror; and, at a zooming instant, applying a second driving moment to the MEMS mirror, wherein the second driving moment is equal to the first driving moment plus an extra moment. The extra moment may be a DC offset. After a transient period of time from zooming instant, a third driving moment M 2 = k ¸ 2 t is applied. The first and third driving moment are variable linearly with time. The driving moments are applied to torsional springs of the mirror.