DUAL-BEAM CHARGED PARTICLE APPARATUS WITH ANTI-CONTAMINATION SHIELD

Disclosed herein is a composite charged particle beam apparatus including a sample tray 15 on which a sample S is placed; a focused ion beam column 11 irradiating the sample by using a focused ion beam; an electron beam column 12 irradiating the sample by using an electron beam; a sample chamber rec...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	OONISHI, Tsuyoshi, HASUDA, Masakatsu
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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