VACUUM PUMP
PROBLEM TO BE SOLVED: To provide an improved vacuum pump having a permanent magnet supporting portion capable of reducing or preventing demerits of prior arts.SOLUTION: A vacuum pump, in particular a turbo molecular pump, has a rotor (149) rotatable on a rotating shaft (151) relative to a stator of...
Gespeichert in:
Hauptverfasser: | , |
---|---|
Format: | Patent |
Sprache: | eng ; fre ; ger |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | PROBLEM TO BE SOLVED: To provide an improved vacuum pump having a permanent magnet supporting portion capable of reducing or preventing demerits of prior arts.SOLUTION: A vacuum pump, in particular a turbo molecular pump, has a rotor (149) rotatable on a rotating shaft (151) relative to a stator of the vacuum pump, and at least one permanent magnet supporting portion (31, 61) is disposed for the rotatable supporting portion. The permanent magnet supporting portion (31, 61) has at least one, in particular ring-shaped or hollow cylinder-shaped, monolith-type permanent magnet (33, 35, 63, 65, 71, 73), which has two or more parts (41, 43, 45, 47, 49) continuous in an axial direction. Neighboring ones of the parts (41, 43, 45, 47, 49) have at least magnetic pole directions (P, P') basically opposite to each other.SELECTED DRAWING: Figure 1 |
---|