MEASUREMENT PROCESSING DEVICE, MEASUREMENT PROCESSING METHOD, MEASUREMENT PROCESSING PROGRAM, AND STRUCTURE PRODUCTION METHOD

A measurement processing device used for an x-ray inspection apparatus that detects an x-ray passing through a specimen with a detection unit to sequentially inspect a plurality of specimens on the basis of an acquired transmission image, includes a setting unit for setting a region to be inspected...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	KAWAI, Akitoshi, MACHII, Nobukatsu, HAYANO, Fuminori
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	A measurement processing device used for an x-ray inspection apparatus that detects an x-ray passing through a specimen with a detection unit to sequentially inspect a plurality of specimens on the basis of an acquired transmission image, includes a setting unit for setting a region to be inspected on a portion of the specimen; a determination unit for determining the non-defectiveness of the region to be inspected by using a transmission image of the x-ray that passed through the region to be inspected; a correction unit for performing a correction on the region to be inspected on the basis of a determination result by the determination unit; and a display control unit for displaying the corrected region to be inspected corrected by the correction unit.