3D SEMICIRCULAR VERTICAL NAND STRING WITH SELF ALIGNED FLOATING GATE OR CHARGE TRAP CELL MEMORY CELLS AND METHODS OF FABRICATING AND OPERATING THE SAME

A three dimensional NAND device includes a common vertical channel and electrically isolated control gate electrodes on different lateral sides of the channel in each device level to form different lateral portions of a memory cell in each device level. Dielectric separator structures are located be...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: ZHANG, Yanli, ALSMEIER, Johann, KAI, James K, CHIEN, Henry, SEROV, Andrey
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:A three dimensional NAND device includes a common vertical channel and electrically isolated control gate electrodes on different lateral sides of the channel in each device level to form different lateral portions of a memory cell in each device level. Dielectric separator structures are located between and electrically isolate the control gate electrodes. The lateral portions of the memory cell in each device level may be electrically isolated by at least one of doping ungated portions of the channel adjacent to the separator structures or storing electrons in the separator structure.