VARIABLE POWER CAPACITOR FOR RF POWER APPLICATIONS

A power capacitor (7) is described for use in an RF power delivery system. The power capacitor comprises at least two RF electrodes (18, 19) separated by a capacitor dielectric (17) comprising a solid paraelectric dielectric material whose relative permittivity is controllable by varying a DC bias v...

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Bibliographische Detailangaben
Hauptverfasser:	ABRECHT, Mike, FINK, Thomas, BIGLER, Walter
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS BASIC ELECTRONIC CIRCUITRY CAPACITORS CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES ORLIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS RESONATORS
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Beschreibung
Zusammenfassung:	A power capacitor (7) is described for use in an RF power delivery system. The power capacitor comprises at least two RF electrodes (18, 19) separated by a capacitor dielectric (17) comprising a solid paraelectric dielectric material whose relative permittivity is controllable by varying a DC bias voltage applied across the dielectric (17) at DC bias electrodes (10, 26, 28). Composite capacitor configurations, an RF power system and a method of controlling the power capacitor are also described.