METHOD OF SCREEN PRINTING IN MANUFACTURING AN IMAGE SENSOR DEVICE

A method of manufacturing an image sensor device includes providing a metalized thin film transistor layer (106) on a glass substrate (102); forming an inter-layer dielectric layer (112) on the metalized thin film transistor layer (106); forming a via through the inter-layer dielectric layer (112);...

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Bibliographische Detailangaben
Hauptverfasser: O'ROURKE, Shawn Michael, RODRIQUEZ, Robert
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:A method of manufacturing an image sensor device includes providing a metalized thin film transistor layer (106) on a glass substrate (102); forming an inter-layer dielectric layer (112) on the metalized thin film transistor layer (106); forming a via through the inter-layer dielectric layer (112); forming a metal layer (120 - 126) on the inter-layer dielectric (112) for contacting the metalized thin film transistor layer (106); forming a bank layer (128) on the metal layer (120-126) and the inter-layer dielectric layer (112); forming a via through the bank layer (128); forming an electron transport layer (136) on the bank layer (128) and within the bank layer via for contacting an upper surface of the metal layer (120-126); forming a bulk hetero-junction layer (138) on the electron transport layer (136); forming a hole transport layer (140) on the bulk hetero-junction layer (138); and forming a top contact layer (142) on the hole transport layer (140). The bulk hetero-junction layer (138) and/or the top contact layer (142) are applied using a screen printing technique.