OPTICAL ELEMENT
The optical element according to the present invention is provided with, on a substrate, an anti-reflection layer on which a plurality of small concave protrusions, which have a modal pitch less than or equal to a wavelength of light in an environment where the optical element is to be used, are for...
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| Format: | Patent |
| Sprache: | eng ; fre ; ger |
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| Zusammenfassung: | The optical element according to the present invention is provided with, on a substrate, an anti-reflection layer on which a plurality of small concave protrusions, which have a modal pitch less than or equal to a wavelength of light in an environment where the optical element is to be used, are formed; wherein 80% or more of the concave protrusions include one or more steps, and satisfy the following conditions: 0.12d ¤ w s ¤ 0.17d and 0.42h ¤ z s ¤0.52h, wherein d is a diameter of the concave protrusions, h is a depth of the concave protrusions, w s is a total width of the steps in any cut surface; and z s is an average depth of the steps. |
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