GAS ENCLOSURE SYSTEMS AND METHODS UTILIZING CROSS-FLOW GAS CIRCULATION AND FILTRATION

The present teachings relate to various embodiments of a gas enclosure system that can have a particle control system that can include a multi-zone gas circulation and filtration system, a low-particle-generating X-axis linear bearing system for moving a printhead assembly relative to a substrate, a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	VRONSKY, Eliyahu, IYENGAR, Prahallad, PUN, Digby, KO, Alexander Sou-Kang, MAUCK, Justin
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	ELECTRICITY
Online-Zugang:	Volltext bestellen
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