DEPOSITION OF ZINC OXYSULPHIDE BY CVD

A method of coating a substrate with zinc oxysulphate (ZnO(1-x)Sx, where 0≦x≦1) by atmospheric pressure chemical vapour deposition is disclosed. Various precursors offering sources of zinc, oxygen and sulphur are provided.

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Bibliographische Detailangaben
Hauptverfasser:	COLLEY, Anna Louise, HARRIS, Peter Michael, STRICKLER, David Alan, PALMER, Liam Sonie, NICHOL, Gary Robert
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	A method of coating a substrate with zinc oxysulphate (ZnO(1-x)Sx, where 0≦x≦1) by atmospheric pressure chemical vapour deposition is disclosed. Various precursors offering sources of zinc, oxygen and sulphur are provided.