PIEZORESISTIVE DETECTION RESONANT DEVICE IN PARTICULAR WITH LARGE VIBRATION AMPLITUDE

Piezoresistive detection resonant device comprising a substrate (4), a mobile part (2) configured to move with respect the substrate (4), suspension means (6) suspending the mobile part (2) to the substrate (4), a piezoresistive detection device (10) to detect the motions of the mobile part (2), sai...

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Bibliographische Detailangaben
Hauptverfasser:	DELLEA, Stefano, JOURDAN, Guillaume, REY, Patrice, LANGFELDER, Giacomo, LONGONI, Antonio F, ROBERT, Philippe
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	GYROSCOPIC INSTRUMENTS INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING DISTANCES, LEVELS OR BEARINGS MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK NAVIGATION PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHYSICS SURVEYING TESTING
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Beschreibung
Zusammenfassung:	Piezoresistive detection resonant device comprising a substrate (4), a mobile part (2) configured to move with respect the substrate (4), suspension means (6) suspending the mobile part (2) to the substrate (4), a piezoresistive detection device (10) to detect the motions of the mobile part (2), said piezoresistive detection device (10) comprising at least one strain gauge (12), wherein the piezoresistive detection resonant device also comprises a folded spring (20) with at least two spring arms, connected to the mobile part (2) and configured to be deformed by the motion of the mobile part (2), the at least one gauge (12) being suspended between the substrate (4) and the folded spring (20) in such manner that the deformation of the gauge is reduced compared to the motion of the mobile part.