PIEZOELECTRIC PRESSURE SENSOR

A piezoelectric pressure sensor includes a sensor housing that accommodates a membrane, a piezoelectric sensor, a charge pick-off and a pre-stressing assembly. The membrane captures a pressure profile, and polarization charges are generated accordingly on the piezoelectric sensor by the captured pre...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Buck, Reinhold, Giger, Martin
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:A piezoelectric pressure sensor includes a sensor housing that accommodates a membrane, a piezoelectric sensor, a charge pick-off and a pre-stressing assembly. The membrane captures a pressure profile, and polarization charges are generated accordingly on the piezoelectric sensor by the captured pressure profile. The pre-stressing assembly includes a pre-stressing body and a pre-stressing sleeve and mechanically pre-stresses the piezoelectric sensor. The charge pick-off receives the polarization charges and is electrically insulated from the pre-stressing sleeve by a second gap. The charge pick-off is mechanically connected to the pre-stressing body via a first electric insulation body on a side of the pre-stressing body that faces away from the membrane and seals the second gap in a pressure-tight manner from an environment of the second gap.