SEGMENTED NPN VERTICAL BIPOLAR TRANSISTOR
A segmented bipolar transistor includes a p-base in a semiconductor surface including at least one p-base finger having a base metal/silicide stack including a base metal line that contacts a silicide layer on the semiconductor surface of the p-base finger. An n+ buried layer is under the p-base. A...
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Sprache: | eng ; fre ; ger |
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Zusammenfassung: | A segmented bipolar transistor includes a p-base in a semiconductor surface including at least one p-base finger having a base metal/silicide stack including a base metal line that contacts a silicide layer on the semiconductor surface of the p-base finger. An n+ buried layer is under the p-base. A collector includes an n+ sinker extending from the semiconductor surface to the n+ buried layer including a collector finger having a collector metal/silicide stack including a collector metal line that contacts a silicide layer on the semiconductor surface of the collector finger. An n+ emitter has at least one emitter finger including an emitter metal/silicide stack that contacts the silicide layer on the semiconductor surface of the emitter finger. The emitter metal/silicide stack and/or collector metal/silicide stack include segmentation with a gap which cuts a metal line and/or the silicide layer of the stack. |
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